Invention Grant
US07791065B2 Ultrasensitive optical detector having a large temporal resolution and using a waveguide, and methods for producing said detector
有权
具有大的时间分辨率和使用波导的超灵敏光学检测器以及用于产生所述检测器的方法
- Patent Title: Ultrasensitive optical detector having a large temporal resolution and using a waveguide, and methods for producing said detector
- Patent Title (中): 具有大的时间分辨率和使用波导的超灵敏光学检测器以及用于产生所述检测器的方法
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Application No.: US11915946Application Date: 2006-06-06
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Publication No.: US07791065B2Publication Date: 2010-09-07
- Inventor: Laurent Frey , Jean-Claude Villegier
- Applicant: Laurent Frey , Jean-Claude Villegier
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique
- Current Assignee: Commissariat a l'Energie Atomique
- Current Assignee Address: FR Paris
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR0551525 20050607
- International Application: PCT/FR2006/050525 WO 20060606
- International Announcement: WO2006/134290 WO 20061221
- Main IPC: H01L31/0256
- IPC: H01L31/0256 ; H01L27/18 ; G02B6/26

Abstract:
An ultrasensitive optical detector with high resolution in time, using a waveguide, and a processes for manufacturing this detector. The detector is configured to detect at least one photon and includes a dielectric substrate and at least one detection element on the substrate, configured to generate an electrical signal starting from energy of the photon received, and a guide element to guide the photon, the energy of which is then absorbed by the detection element at an absorption zone which is less than 100 nm thick. The detection element is substantially straight on the substrate and is short, and the guide element includes a single mode light waveguide with strong confinement, placed on the detection element. The detector is particularly applicable to detection and localization of operating defects in a semiconducting circuit.
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