发明授权
US07795096B2 Method of forming an integrated circuit with two types of transistors 有权
用两种晶体管形成集成电路的方法

  • 专利标题: Method of forming an integrated circuit with two types of transistors
  • 专利标题(中): 用两种晶体管形成集成电路的方法
  • 申请号: US11647602
    申请日: 2006-12-29
  • 公开(公告)号: US07795096B2
    公开(公告)日: 2010-09-14
  • 发明人: Peng-Fei Wang
  • 申请人: Peng-Fei Wang
  • 申请人地址: DE Munich
  • 专利权人: Qimonda AG
  • 当前专利权人: Qimonda AG
  • 当前专利权人地址: DE Munich
  • 代理机构: Edell, Shapiro & Finnan, LLC
  • 主分类号: H01L21/336
  • IPC分类号: H01L21/336
Method of forming an integrated circuit with two types of transistors
摘要:
An integrated circuit includes a transistor of a first type with a first gate electrode and a transistor of a second type with a second gate electrode. The first gate electrode is formed in a first gate groove that is defined in a semiconductor substrate, and the second gate electrode is formed in a second gate groove defined in the semiconductor substrate. The first gate electrode completely fills a space between two adjacent first isolation trenches, and the second gate electrode partially fills a space between two adjacent second isolation trenches, with substrate portions being arranged between the second gate electrode and the adjacent second isolation trenches, respectively.
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