发明授权
- 专利标题: Vacuum debris removal system
- 专利标题(中): 真空除渣系统
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申请号: US11977879申请日: 2007-10-26
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公开(公告)号: US07795559B2公开(公告)日: 2010-09-14
- 发明人: Leszek Wojcik , Diwakar Kedlaya , Kanti Jain , Sivarama Krishna Kuchibhotla , Arun Paneerselvam
- 申请人: Leszek Wojcik , Diwakar Kedlaya , Kanti Jain , Sivarama Krishna Kuchibhotla , Arun Paneerselvam
- 申请人地址: US NY Hawthorne
- 专利权人: Anvik Corporation
- 当前专利权人: Anvik Corporation
- 当前专利权人地址: US NY Hawthorne
- 代理商 Carl C. King
- 主分类号: B23K26/00
- IPC分类号: B23K26/00
摘要:
A turbulence-controlled vacuum debris removal subsystem safely exhausts particles ejected during photoablation. Nested interconnected chambers provide diminishing sweeping gas partial pressure and diminishing turbulence, ejecting particles from the ablation beam path between pulses, without compromising continuing particle conductance. Removal rate (debris generation rate) depends on conductance and particle sizes. The chambers interconnect through metering holes which enable optimization of partial pressure differentials. Controlled flow accomplishes debris removal, reducing turbulence of the mixture of debris and sweeping gases. A preferred embodiment uses a nest of concentric chambers, providing a clear light path. Another preferred embodiment uses orifices on chamber faces for removal and forming an envelope of gas around the processing region for dynamically containing the ejected particulate matter from the ablation site to the exhaust.
公开/授权文献
- US20090107966A1 Vacuum debris removal system 公开/授权日:2009-04-30
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