发明授权
- 专利标题: Polymers, methods of use thereof, and methods of decomposition thereof
- 专利标题(中): 聚合物,其使用方法及其分解方法
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申请号: US10686697申请日: 2003-10-16
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公开(公告)号: US07799516B2公开(公告)日: 2010-09-21
- 发明人: Paul A. Kohl , SueAnn Bidstrup Allen , Xiaoqun Wu , Clifford Lee Henderson
- 申请人: Paul A. Kohl , SueAnn Bidstrup Allen , Xiaoqun Wu , Clifford Lee Henderson
- 申请人地址: US GA Atlanta
- 专利权人: Georgia Tech Research Corporation
- 当前专利权人: Georgia Tech Research Corporation
- 当前专利权人地址: US GA Atlanta
- 代理机构: The Webb Law Firm
- 主分类号: G03F7/40
- IPC分类号: G03F7/40 ; G03F7/20 ; G03F7/30 ; G03F7/36
摘要:
Polymers, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary polymer, among others, includes, a photodefinable polymer having a sacrificial polymer and a photoinitiator.
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