Invention Grant
US07804076B2 Insulator for high current ion implanters 有权
绝缘子用于高电流离子注入机

Insulator for high current ion implanters
Abstract:
An insulator usable in high current ion implantation systems includes increased surface due to the configuration of an inner cylinder and an outer cylinder coupled to the inner cylinder at one end. A cylindrical cavity extends between the two cylinders increasing the surface area and making the insulator resistant to being coated by a coating that could produce a leakage path.
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