公开(公告)号：US20070262270A1

公开(公告)日：2007-11-15

申请号：US11382600

申请日：2006-05-10

申请人： James Huang ,  Yung-Cheng Kuo ,  Min-Kung Hsu

发明人： James Huang ,  Yung-Cheng Kuo ,  Min-Kung Hsu

IPC分类号： H01J37/317

CPC分类号： H01J37/04 ,  H01J37/3171 ,  H01J2237/038 ,  Y10T428/31663

摘要： An insulator usable in high current ion implantation systems includes increased surface due to the configuration of an inner cylinder and an outer cylinder coupled to the inner cylinder at one end. A cylindrical cavity extends between the two cylinders increasing the surface area and making the insulator resistant to being coated by a coating that could produce a leakage path.

摘要翻译： 可用于高电流离子注入系统的绝缘体包括由于在一端连接到内筒的内筒和外筒的构造而增加的表面。 圆柱形空腔在两个气缸之间延伸，增加了表面积，并使得绝缘体能够被可能产生泄漏路径的涂层涂覆。

公开(公告)号：US07804076B2

公开(公告)日：2010-09-28

申请号：US11382600

申请日：2006-05-10

申请人： James Huang ,  Yung-Cheng Kuo ,  Min-Kung Hsu

发明人： James Huang ,  Yung-Cheng Kuo ,  Min-Kung Hsu

IPC分类号： H01J37/317

CPC分类号： H01J37/04 ,  H01J37/3171 ,  H01J2237/038 ,  Y10T428/31663

摘要： An insulator usable in high current ion implantation systems includes increased surface due to the configuration of an inner cylinder and an outer cylinder coupled to the inner cylinder at one end. A cylindrical cavity extends between the two cylinders increasing the surface area and making the insulator resistant to being coated by a coating that could produce a leakage path.

摘要翻译： 可用于高电流离子注入系统的绝缘体包括由于在一端连接到内筒的内筒和外筒的构造而增加的表面。 圆柱形空腔在两个气缸之间延伸，增加了表面积，并使得绝缘体能够被可能产生泄漏路径的涂层涂覆。