发明授权
- 专利标题: Droplet discharging head, image forming apparatus, and film forming apparatus
- 专利标题(中): 喷液头,成像装置和成膜装置
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申请号: US11688046申请日: 2007-03-19
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公开(公告)号: US07804225B2公开(公告)日: 2010-09-28
- 发明人: Hayato Takahashi
- 申请人: Hayato Takahashi
- 申请人地址: JP Tokyo
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Workman Nydegger
- 优先权: JP2006-075507 20060317
- 主分类号: H01L41/08
- IPC分类号: H01L41/08
摘要:
A droplet discharging head, includes a diaphragm, a fixing plate, and a piezoelectric element. The piezoelectric element includes a first electrode, a second electrode, a piezoelectric body layer interposed between the first and second electrodes, a first internal electrode extending from the first electrode between the first, and second electrodes, and a second internal electrode extending from the second electrode between the first and second electrodes. At least a part of a first end face of the piezoelectric element is in contact with the diaphragm. The first end face includes a first end of the first electrode, a first end of the second electrode, and a first end of the piezoelectric Body. The piezoelectric body layer includes an active layer that overlaps both the first and second internal electrodes, a first inactive layer that overlaps only the first internal electrode, and a second inactive layer that overlaps only the second internal electrode. A thickness of the second inactive layer between the second electrode and the active layer is larger than a thickness of the first inactive layer between the first electrode and the active layer.
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