发明授权
- 专利标题： Scanning examination apparatus
- 专利标题（中）： 扫描检查仪
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申请号： US11913833申请日： 2006-05-16
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公开(公告)号： US07804642B2公开(公告)日： 2010-09-28
- 发明人: Nobuyuki Nagasawa , Masahiro Oba , Tetsuya Koike , Yoshihisa Tanikawa , Yujin Arai
- 申请人： Nobuyuki Nagasawa , Masahiro Oba , Tetsuya Koike , Yoshihisa Tanikawa , Yujin Arai
- 申请人地址： JP Tokyo
- 专利权人： Olympus Corporation
- 当前专利权人： Olympus Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Pillsbury Winthrop Shaw Pittman, LLP
- 优先权： JP2005-142376 20050516; JP2005-202830 20050712; JP2005-254917 20050902
- 国际申请： PCT/JP2006/309715 WO 20060516
- 国际公布： WO2006/123641 WO 20061123
- 主分类号： G02B21/06
- IPC分类号： G02B21/06
摘要：
A scanning examination apparatus 1 is provided, the apparatus including a detachable objective lens 6 or 6′, a scanner 3 for two-dimensionally scanning light F from a specimen 100 focused by the objective lens 6 or 6′, a scanner control device 13 for controlling the operation of the scanner 3, and an optical detector 9 for detecting light scanned by the scanner 3, wherein the scanner control device 13 changes the scanning direction of the light F depending on an image formation mode of the light F at the objective lens 6 or 6′ which is attached.
公开/授权文献
- US20090073554A1 SCANNING EXAMINATION APPARATUS 公开/授权日：2009-03-19
信息查询
