发明授权
- 专利标题: Test cells for semiconductor yield improvement
- 专利标题(中): 测试电池用于半导体产量提高
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申请号: US12002094申请日: 2007-12-14
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公开(公告)号: US07807480B2公开(公告)日: 2010-10-05
- 发明人: Brian Stine , Victor Kitch , Mark Zwald , Stefano Tonello
- 申请人: Brian Stine , Victor Kitch , Mark Zwald , Stefano Tonello
- 申请人地址: US CA San Jose
- 专利权人: PDF Solutions, Inc.
- 当前专利权人: PDF Solutions, Inc.
- 当前专利权人地址: US CA San Jose
- 代理机构: Cantor Colburn LLP
- 主分类号: H01L21/66
- IPC分类号: H01L21/66
摘要:
A test cell for localizing defects includes a first active region, a second active region formed substantially parallel to the first active region, a third active region formed substantially parallel to the first and second active regions, a fourth active region formed between the first and second active regions, and a fifth active region formed between the second and third active regions. The fourth and fifth active regions are formed adjacent to opposite end portions of the second active region. The fourth and fifth active regions are also formed substantially perpendicular to the second active region.
公开/授权文献
- US20080169466A1 Test Cells for semiconductor yield improvement 公开/授权日:2008-07-17