Invention Grant
US07812278B2 Method for testing plasma reactor multi-frequency impedance match networks
有权
等离子体反应堆多频阻抗匹配网络的测试方法
- Patent Title: Method for testing plasma reactor multi-frequency impedance match networks
- Patent Title (中): 等离子体反应堆多频阻抗匹配网络的测试方法
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Application No.: US11778055Application Date: 2007-07-15
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Publication No.: US07812278B2Publication Date: 2010-10-12
- Inventor: Steven C. Shannon
- Applicant: Steven C. Shannon
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely Sokoloff Taylor & Zafman, LLP
- Main IPC: B23K10/00
- IPC: B23K10/00

Abstract:
In one implementation, a method is provided for testing a plasma reactor multi-frequency matching network comprised of multiple matching networks, each of the multiple matching networks having an associated RF power source and being tunable within a tunespace. The method includes providing a multi-frequency dynamic dummy load having a frequency response within the tunespace of each of the multiple matching networks at an operating frequency of its associated RF power source. The method further includes characterizing a performance of the multi-frequency matching network based on a response of the multi-frequency matching network while simultaneously operating at multiple frequencies.
Public/Granted literature
- US20070257743A1 METHOD FOR TESTING PLASMA REACTOR MULTI-FREQUENCY IMPEDANCE MATCH NETWORKS Public/Granted day:2007-11-08
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