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US07812278B2 Method for testing plasma reactor multi-frequency impedance match networks 有权
等离子体反应堆多频阻抗匹配网络的测试方法

Method for testing plasma reactor multi-frequency impedance match networks
Abstract:
In one implementation, a method is provided for testing a plasma reactor multi-frequency matching network comprised of multiple matching networks, each of the multiple matching networks having an associated RF power source and being tunable within a tunespace. The method includes providing a multi-frequency dynamic dummy load having a frequency response within the tunespace of each of the multiple matching networks at an operating frequency of its associated RF power source. The method further includes characterizing a performance of the multi-frequency matching network based on a response of the multi-frequency matching network while simultaneously operating at multiple frequencies.
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