发明授权
US07824948B2 Method and structure for reducing cross-talk in image sensor devices
有权
减少图像传感器设备串扰的方法和结构
- 专利标题： Method and structure for reducing cross-talk in image sensor devices
- 专利标题（中）： 减少图像传感器设备串扰的方法和结构
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申请号： US12357223申请日： 2009-01-21
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公开(公告)号： US07824948B2公开(公告)日： 2010-11-02
- 发明人: Ching-Chun Wang , Tzu-Hsuan Hsu , Han-Chi Liu , Chun-Ming Su
- 申请人： Ching-Chun Wang , Tzu-Hsuan Hsu , Han-Chi Liu , Chun-Ming Su
- 申请人地址： TW Hsin-Chu
- 专利权人： Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人： Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址： TW Hsin-Chu
- 代理机构： Haynes and Boone, LLP
- 主分类号： H01L27/14
- IPC分类号： H01L27/14 ; H01L33/00
摘要：
Provided is a method of fabricating an image sensor device. The method includes providing a semiconductor substrate having a front side and a back side, forming a first isolation structure at the front side of the semiconductor substrate, thinning the semiconductor substrate from the back side, and forming a second isolation structure at the back side of the semiconductor substrate. The first and second isolation structures are shifted with respect to each other.