发明授权
- 专利标题： Vacuum processing apparatus
- 专利标题（中）： 真空加工设备
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申请号： US12230459申请日： 2008-08-29
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公开(公告)号： US07833382B2公开(公告)日： 2010-11-16
- 发明人: Akitaka Makino , Youji Takahashi , Minoru Soraoka , Hideki Kihara , Susumu Tauchi
- 申请人： Akitaka Makino , Youji Takahashi , Minoru Soraoka , Hideki Kihara , Susumu Tauchi
- 申请人地址： JP Tokyo
- 专利权人： Hitachi High-Technologies Corporation
- 当前专利权人： Hitachi High-Technologies Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Antonelli, Terry, Stout & Kraus, LLP.
- 主分类号： C23F1/00
- IPC分类号： C23F1/00 ; H01L21/306
摘要：
A vacuum processing apparatus comprising a transfer unit disposed at a center thereof, plural processing chambers, each processing chamber having a processing table for supporting an object to be processed and carrying out processing using a gas; and amass flow controller unit interposed between two processing chambers for supplying gas to the chambers.
公开/授权文献
- US20090000739A1 Vacuum processing apparatus 公开/授权日：2009-01-01
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