公开(公告)号：US08897906B2

公开(公告)日：2014-11-25

申请号：US13236818

申请日：2011-09-20

Applicant: Tomohiro Ohashi ,  Akitaka Makino ,  Hiroho Kitada ,  Hideki Kihara

Inventor： Tomohiro Ohashi ,  Akitaka Makino ,  Hiroho Kitada ,  Hideki Kihara

IPC: H01L21/68 ,  H01L21/677

CPC classification number: H01L21/68 ,  H01L21/67742 ,  Y10S901/03 ,  Y10S901/46

Abstract: A vacuum processing apparatus includes a robot connected to a vacuum container to carry a wafer on one of its two arms to or from a processing chamber; a unit to detect an amount of deviation of the wafer from a predetermined wafer mounting position on the arm that may occur when the robot carries the wafer into or out of the processing chamber; and an adjusting device to adjust the operation of the robot based on the detected amount of deviation. The adjusting device adjusts the robot operation based on the result of a teaching operation performed in advance. After being subjected to the initial teaching operation, the robot again undergoes a second teaching operation according to the information on the amount of wafer position deviation that is detected by moving the wafer in a predetermined transfer pattern, before the wafer processing is performed.

Abstract translation: 真空处理装置包括连接到真空容器以将其两个臂中的一个上的晶片携带到处理室或从处理室移动的机器人; 用于检测当机器人将晶片进入或离开处理室时可能发生的晶片与在臂上的预定晶片安装位置的偏移量的单元; 以及基于检测到的偏差量来调整机器人的操作的调整装置。 调整装置根据预先执行的教学动作的结果调整机器人的动作。 在进行初始教导操作之后，根据关于在执行晶片处理之前通过以预定的传送图案移动晶片来检测的晶片位置偏差量的信息，机器人再次进行第二示教操作。

公开(公告)号：US08460467B2

公开(公告)日：2013-06-11

申请号：US13177076

申请日：2011-07-06

Applicant: Akitaka Makino ,  Youji Takahashi ,  Minoru Soraoka ,  Hideki Kihara ,  Susumu Tauchi

Inventor： Akitaka Makino ,  Youji Takahashi ,  Minoru Soraoka ,  Hideki Kihara ,  Susumu Tauchi

IPC: C23F1/00 ,  C23C16/00 ,  H01L21/677

CPC classification number: H01L21/6719 ,  H01L21/67017 ,  Y10S414/135 ,  Y10S414/139

Abstract: A vacuum processing apparatus includes a transfer unit disposed at a center thereof, plural processing chambers, each processing chamber having a processing table for supporting an object to be processed and carrying out processing using a gas, and a mass flow controller unit interposed between two of the processing chambers for supplying gas to the chambers.

Abstract translation: 一种真空处理装置，包括设置在其中心的转印单元，多个处理室，每个处理室具有用于支撑待处理物体的处理台，并使用气体进行处理;以及质量流量控制单元， 用于向腔室供应气体的处理室。

公开(公告)号：US08286822B2

公开(公告)日：2012-10-16

申请号：US12651701

申请日：2010-01-04

Applicant: Susumu Tauchi ,  Akitaka Makino

Inventor： Susumu Tauchi ,  Akitaka Makino

IPC: B65D6/40 ,  B65D53/02 ,  B65D43/04

CPC classification number: H01L21/67126 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201

Abstract: The invention provides a highly reliable plasma processing apparatus having stable sealing performance. The vacuum processing apparatus comprises a vacuum vessel having its inside decompressed; an opening disposed in a wall of the vacuum vessel for communicating the inside with the outside thereof and through which a sample to be processed is taken in and out; a valve body 701 disposed outside the wall for airtightly sealing or opening the opening; and a drive unit for driving the valve body to carry out the sealing or opening operation, the drive unit comprising a first member 705 coupled to an actuator 702 that moves along a substantially linear first direction as a result of operation of the actuator, a second member 706 coupled to the first member 705 that moves along a substantially linear second direction that intersects with the first direction, and the valve body 701 coupled to the second member that seals the opening as a result of the movement of the second member.

Abstract translation: 本发明提供了具有稳定的密封性能的高度可靠的等离子体处理装置。 真空处理装置包括其内部减压的真空容器; 设置在真空容器的壁中的开口，用于将内部与其外部连通，并且待处理样品通过该开口被取出; 阀体701，其设置在所述壁的外侧，用于气密地密封或打开所述开口; 驱动单元，用于驱动阀体进行密封或打开操作，驱动单元包括第一构件705，第一构件705联接到作为致动器的操作的结果沿基本线性的第一方向移动的致动器702;第二构件 构件706，其联接到第一构件705，其沿着与第一方向相交的基本上线性的第二方向移动;以及阀体701，其联接到由于第二构件的移动而密封开口的第二构件。

公开(公告)号：US20110259522A1

公开(公告)日：2011-10-27

申请号：US13177076

申请日：2011-07-06

Applicant: Akitaka MAKINO ,  Youji TAKAHASHI ,  Minoru SORAOKA ,  Hideki KIHARA ,  Susumu TAUCHI

Inventor： Akitaka MAKINO ,  Youji TAKAHASHI ,  Minoru SORAOKA ,  Hideki KIHARA ,  Susumu TAUCHI

IPC: C23F1/08

CPC classification number: H01L21/6719 ,  H01L21/67017 ,  Y10S414/135 ,  Y10S414/139

Abstract: A vacuum processing apparatus includes a transfer unit disposed at a center thereof, plural processing chambers, each processing chamber having a processing table for supporting an object to be processed and carrying out processing using a gas, and a mass flow controller unit interposed between two of the processing chambers for supplying gas to the chambers.

Abstract translation: 一种真空处理装置，包括设置在其中心的转印单元，多个处理室，每个处理室具有用于支撑待处理物体的处理台，并使用气体进行处理;以及质量流量控制单元， 用于向腔室供应气体的处理室。

公开(公告)号：US20080217295A1

公开(公告)日：2008-09-11

申请号：US11683014

申请日：2007-03-07

Applicant: SUSUMU TAUCHI ,  Akitaka Makino ,  Seiichi Watanabe ,  Naoki Yasui

Inventor： SUSUMU TAUCHI ,  Akitaka Makino ,  Seiichi Watanabe ,  Naoki Yasui

IPC: C23F1/00

CPC classification number: C23F4/00 ,  G03F1/80 ,  H01J37/32522 ,  H01L21/67017 ,  H01L21/67109 ,  H01L21/6831

Abstract: The present invention provides a plasma processing apparatus or a plasma processing method that can etch a multilayer film structure for constituting a gate structure with high accuracy and high efficiency. A plasma processing method of, on processing a sample on a sample stage 112 in a depressurized discharge room 117, etching a multilayer film (including a high-k and a metal gate) at 0.1 Pa or less and with the sample stage 112 temperature-regulated by using a pressure gauge 133 to be used for pressure regulation and connected to the processing room and a main pump for exhaustion 130.

Abstract translation: 本发明提供等离子体处理装置或等离子体处理方法，其可以以高精度和高效率蚀刻用于构成栅极结构的多层膜结构。 一种等离子体处理方法，在对减压排出室117中的样品台112上的样品进行处理时，蚀刻0.1Pa以下的多层膜（包括高k和金属栅极），并且在样品台112中， 通过使用用于压力调节并连接到处理室的压力计133和用于耗尽的主泵130进行调节。

公开(公告)号：US20070209759A1

公开(公告)日：2007-09-13

申请号：US11501814

申请日：2006-08-10

Applicant: Go Miya ,  Naoshi Itabashi ,  Seiichiro Kanno ,  Akitaka Makino ,  Hiroshi Akiyama

Inventor： Go Miya ,  Naoshi Itabashi ,  Seiichiro Kanno ,  Akitaka Makino ,  Hiroshi Akiyama

IPC: H01L21/306 ,  C23F1/00

CPC classification number: H01L21/32137 ,  H01J37/32192 ,  H01J37/3244

Abstract: In performing plasma etching with the aim to form a gate electrode on a large-diameter substrate, it is difficult according to prior art methods to ensure the in-plane uniformity of CD shift of the gate electrode. The present invention solves the problem by supplying processing gases having different flow rates and compositions respectively through openings formed at positions opposing to the substrate and at the upper corner or side wall of the processing chamber.

Abstract translation: 为了在大直径基板上形成栅电极进行等离子体蚀刻，根据现有技术的方法难以确保栅电极的CD偏移的平面内均匀性。 本发明通过分别通过形成在与基板相对的位置处的开口和在处理室的上角或侧壁处分别提供具有不同流速和组成的处理气体来解决该问题。

公开(公告)号：US20050194093A1

公开(公告)日：2005-09-08

申请号：US10928259

申请日：2004-08-30

Applicant: Akitaka Makino ,  Hideki Kihara ,  Susumu Tauchi

Inventor： Akitaka Makino ,  Hideki Kihara ,  Susumu Tauchi

IPC: H01L21/3065 ,  C23F1/00

CPC classification number: H01L21/6719 ,  H01J37/32522 ,  H01L21/67126 ,  Y10S156/916

Abstract: The present invention provides a vacuum processing apparatus which is small-sized and requires a small installation area. The vacuum processing apparatus includes a vacuum container which has a processing chamber inside thereof, wherein the pressure inside the processing chamber is reduced and plasma used for processing a sample is formed inside the processing chamber, a bed portion which is arranged below the vacuum container and stores a device for supplying electricity and electric signals used for processing inside the vacuum container, and a transport chamber which is connected with the vacuum container and includes a transport device for transporting the sample inside thereof. The vacuum processing apparatus further includes a connector portion which is mounted on the bed portion in a state that the connector portion faces a lower portion of the transport chamber, wherein the bed portion is configured to be detachably mounted on the vacuum processing apparatus in a state that the bed portion performs the connection and the disconnection at the connector portion.

Abstract translation: 本发明提供一种小型化并且需要小的安装面积的真空处理装置。 真空处理装置包括在其内部具有处理室的真空容器，其中处理室内部的压力减小，处理室内部形成用于处理样品的等离子体，布置在真空容器下方的床部， 存储用于供电的设备和用于在真空容器内部进行处理的电信号;以及运送室，其与该真空容器连接并且包括用于在其内部运送样品的运送装置。 真空处理装置还包括连接器部分，其在连接器部分面向传送室的下部的状态下安装在床部分上，其中，床部分被构造成在状态下可拆卸地安装在真空处理设备上 床部分在连接器部分处执行连接和断开。

公开(公告)号：US5607510A

公开(公告)日：1997-03-04

申请号：US394952

申请日：1995-02-27

Applicant: Akitaka Makino ,  Naoyuki Tamura ,  Tetsunori Kaji

Inventor： Akitaka Makino ,  Naoyuki Tamura ,  Tetsunori Kaji

IPC: B01J3/02 ,  B01J19/08 ,  H01L21/00 ,  H01L21/205 ,  C23C16/02

CPC classification number: H01L21/67069 ,  Y10S438/935

Abstract: To improve an actual exhaust speed, in a vacuum processing device for processing a work located in a vacuum processing chamber by using a processing gas introduced into the vacuum processing chamber, the vacuum processing device having means for introducing the processing gas into the vacuum processing chamber, means for controlling a gas flow of the processing gas, and means for exhausting the processing gas after the work is processed by the processing gas; the exhausting means comprises an exhaust pump, a buffer space extended in a direction substantially perpendicular to a center of the work with an extended area larger than a size of a suction port of the exhaust pump, and a gas outlet formed on a back side of a surface of the work to be processed, the gas outlet having a size substantially equal to or larger than the size of the suction port of the exhaust pump. Further, the exhaust arrangement can be provided at a shifted position so as to allow a work space beneath a work table.

Abstract translation: 为了提高实际的排气速度，在真空处理装置中，通过使用引入到真空处理室中的处理气体来处理位于真空处理室中的工件的真空处理装置，该真空处理装置具有将处理气体引入真空处理室 用于控制处理气体的气体流动的装置，以及在处理气体处理了工件之后排出处理气体的装置; 排气装置包括排气泵，在大致垂直于工件中心的方向延伸的缓冲空间，其延伸面积大于排气泵的吸入口的尺寸;以及气体出口，形成在排气泵的背面 要处理的工件的表面，气体出口的尺寸基本上等于或大于排气泵的吸入口的尺寸。 此外，排气装置可以设置在移动位置，以便允许工作台下方的工作空间。

公开(公告)号：US20130053997A1

公开(公告)日：2013-02-28

申请号：US13236818

申请日：2011-09-20

Applicant: Tomohiro Ohashi ,  Akitaka Makino ,  Hiroho Kitada ,  Hideki Kihara

Inventor： Tomohiro Ohashi ,  Akitaka Makino ,  Hiroho Kitada ,  Hideki Kihara

IPC: B25J9/10 ,  B25J13/08

CPC classification number: H01L21/68 ,  H01L21/67742 ,  Y10S901/03 ,  Y10S901/46

Abstract: A vacuum processing apparatus includes a robot connected to a vacuum container to carry a wafer on one of its two arms to or from a processing chamber; a unit to detect an amount of deviation of the wafer from a predetermined wafer mounting position on the arm that may occur when the robot carries the wafer into or out of the processing chamber; and an adjusting device to adjust the operation of the robot based on the detected amount of deviation. The adjusting device adjusts the robot operation based on the result of a teaching operation performed in advance. After being subjected to the initial teaching operation, the robot again undergoes a second teaching operation according to the information on the amount of wafer position deviation that is detected by moving the wafer in a predetermined transfer pattern, before the wafer processing is performed.

Abstract translation: 真空处理装置包括连接到真空容器以将其两个臂中的一个上的晶片携带到处理室或从处理室移动的机器人; 用于检测当机器人将晶片进入或离开处理室时可能发生的晶片与在臂上的预定晶片安装位置的偏移量的单元; 以及基于检测到的偏差量来调整机器人的操作的调整装置。 调整装置根据预先执行的教学动作的结果调整机器人的动作。 在进行初始教导操作之后，根据关于在执行晶片处理之前通过以预定的传送图案移动晶片来检测的晶片位置偏差量的信息，机器人再次进行第二示教操作。

公开(公告)号：US08100620B2

公开(公告)日：2012-01-24

申请号：US12203168

申请日：2008-09-03

Applicant: Masakazu Isozaki ,  Akitaka Makino ,  Shingo Kimura ,  Minoru Yatomi

Inventor： Masakazu Isozaki ,  Akitaka Makino ,  Shingo Kimura ,  Minoru Yatomi

IPC: H01L21/677

CPC classification number: H01L21/6719 ,  H01L21/67017 ,  H01L21/67196

Abstract: A vacuum processing apparatus includes vacuum processing vessels each having a processing chamber with a pressure-reduced interior space, a vacuum transfer vessel which is coupled to the vacuum vessels disposed therearound and which has a low-pressure interior space in which a to-be-processed workpiece is conveyed, an atmospheric air transfer vessel which is coupled to the front side of the vacuum transfer vessel and which includes on its front face side cassette tables mounting thereon a cassette with the workpiece received therein for conveying the workpiece in an interior space under an atmospheric pressure, a position-aligning machine disposed within the atmospheric air transfer vessel at one of right and left ends for adjusting a position of the workpiece, and an adjuster disposed between lower part of this machine and a floor face for adjusting the supply of a fluid being fed to the vacuum processing vessels.

Abstract translation: 真空处理装置包括各自具有具有减压内部空间的处理室的真空处理容器，耦合到设置在其周围的真空容器并具有低压内部空间的真空转移容器， 被输送的处理过的工件;大气转移容器，其连接到真空传送容器的前侧，并且其前表面上包括安装在其上的工作台，其中工件被接收在其中，用于将工件传送到内部空间中 大气压力的位置调整机构，位于左右两端之一的大气输送容器内，用于调整工件的位置;以及调节器，其设置在该机器的下部与底面之间， 流体被供给到真空处理容器。