发明授权
- 专利标题: Method for making a highly stable diamond film on a substrate
- 专利标题(中): 在基材上制备高度稳定的金刚石膜的方法
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申请号: US11898112申请日: 2007-09-10
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公开(公告)号: US07833581B2公开(公告)日: 2010-11-16
- 发明人: Liang Guo , Guohua Chen
- 申请人: Liang Guo , Guohua Chen
- 申请人地址: CN Hong Kong
- 专利权人: The Hong Kong University of Science and Technology
- 当前专利权人: The Hong Kong University of Science and Technology
- 当前专利权人地址: CN Hong Kong
- 代理机构: The Nath Law Group
- 代理商 Matthew J. Moffa; Jerald L. Meyer
- 主分类号: C23C16/00
- IPC分类号: C23C16/00
摘要:
A method of depositing a stable diamond film on a metal substrate includes pretreating a surface of the substrate and depositing a diamond film on the substrate by way of a multi-stage chemical vapor deposition, in which each subsequent stage is performed at progressively higher temperature. The deposited diamond may be doped with boron. The substrate may be titanium, a titanium alloy, iron, an iron alloy, or any other valve metal. The diamond deposition may be a high temperature chemical vapor deposition. The first deposition stage may optionally create a carbide of diamond and substrate, and an optional mixture of diamond and amorphous carbon may be deposited to bond this carbide layer to a subsequently applied layer. The resulting product may be used as an electrode, as a tooth or blade in a cutting tool, or may have many other uses.
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