发明授权
- 专利标题: Device made of single-crystal silicon
- 专利标题(中): 单晶硅器件
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申请号: US12215655申请日: 2008-06-27
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公开(公告)号: US07834452B2公开(公告)日: 2010-11-16
- 发明人: Arnd Kaelberer , Helmut Baumann , Roland Scheuerer , Heribert Weber
- 申请人: Arnd Kaelberer , Helmut Baumann , Roland Scheuerer , Heribert Weber
- 申请人地址: DE Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: DE Stuttgart
- 代理机构: Kenyon & Kenyon LLP
- 优先权: DE102007031549 20070706
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A device made of single-crystal silicon having a first side, a second side which is situated opposite to the first side, and a third side which extends from the first side to the second side, the first side and the second side each extending in a 100 plane of the single-crystal silicon, the third side extending in a first area in a 111 plane of the single-crystal silicon. The third side extends in a second area in a 110 plane of the single-crystal silicon. Furthermore, a production method for producing a device made of single-crystal silicon is described.
公开/授权文献
- US20090008749A1 Device made of single-crystal silicon 公开/授权日:2009-01-08
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