Invention Grant
US07838315B2 Method of manufacturing vertical light emitting diode 有权
制造垂直发光二极管的方法

Method of manufacturing vertical light emitting diode
Abstract:
Provided is a method of manufacturing a vertical LED, the method including the steps of: preparing a sapphire substrate; forming a light emitting structure in which an n-type nitride semiconductor layer, an active layer, and a p-type nitride semiconductor layer are sequentially laminated on the sapphire substrate; forming a p-electrode on the p-type nitride semiconductor layer; forming a structure support layer on the p-electrode; removing the sapphire substrate through an LLO (laser lift-off) process; isolating the light emitting structure into unit LED elements through an ISO (isolation) process; and forming an n-electrode on each of the n-type nitride semiconductor layers of the isolated light emitting structures.
Public/Granted literature
Information query
Patent Agency Ranking
0/0