发明授权
US07838794B2 Laser-based method and system for removing one or more target link structures
有权
用于去除一个或多个目标链路结构的基于激光的方法和系统
- 专利标题: Laser-based method and system for removing one or more target link structures
- 专利标题(中): 用于去除一个或多个目标链路结构的基于激光的方法和系统
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申请号: US11700386申请日: 2007-01-31
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公开(公告)号: US07838794B2公开(公告)日: 2010-11-23
- 发明人: Bo Gu , Donald V. Smart , James J. Cordingley , Joohan Lee , Donald J. Svetkoff , Shepard D. Johnson , Jonathan S. Ehrmann
- 申请人: Bo Gu , Donald V. Smart , James J. Cordingley , Joohan Lee , Donald J. Svetkoff , Shepard D. Johnson , Jonathan S. Ehrmann
- 申请人地址: US MA Bedford
- 专利权人: GSI Group Corporation
- 当前专利权人: GSI Group Corporation
- 当前专利权人地址: US MA Bedford
- 代理机构: Brooks Kushman P.C.
- 主分类号: B23K26/40
- IPC分类号: B23K26/40 ; H01L21/44
摘要:
Laser-based methods and systems for removing one or more target link structures of a circuit fabricated on a substrate includes generating a pulsed laser output at a predetermined wavelength less than an absorption edge of the substrate are provided. The laser output includes at least one pulse having a pulse duration in the range of about 10 picoseconds to less than 1 nanosecond, the pulse duration being within a thermal laser processing range. The method also includes delivering and focusing the laser output onto the target link structure. The focused laser output has sufficient power density at a location within the target link structure to reduce the reflectivity of the target link structure and efficiently couple the focused laser output into the target link structure to remove the target link structure without damaging the substrate.
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