Invention Grant
US07838942B2 Substrate solution for back gate controlled SRAM with coexisting logic devices
有权
用于具有共存逻辑器件的背栅控制SRAM的衬底解决方案
- Patent Title: Substrate solution for back gate controlled SRAM with coexisting logic devices
- Patent Title (中): 用于具有共存逻辑器件的背栅控制SRAM的衬底解决方案
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Application No.: US12144272Application Date: 2008-06-23
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Publication No.: US07838942B2Publication Date: 2010-11-23
- Inventor: Robert H. Dennard , Wilfried E. Haensch , Arvind Kumar , Robert J. Miller
- Applicant: Robert H. Dennard , Wilfried E. Haensch , Arvind Kumar , Robert J. Miller
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
A semiconductor structure that includes at least one logic device region and at least one static random access memory (SRAM) device region wherein each device region includes a double gated field effect transistor (FET) wherein the back gate of each of the FET devices is doped to a specific level so as to improve the performance of the FET devices within the different device regions is provided. In particular, the back gate within the SRAM device region is more heavily doped than the back gate within the logic device region. In order to control short channel effects, the FET device within the logic device region includes a doped channel, while the FET device within the SRAM device region does not. A none uniform lateral doping profile with a low net doping beneath the source/drain regions and a high net doping underneath the channel would provide additional SCE control for the logic device.
Public/Granted literature
- US20080258221A1 SUBSTRATE SOLUTION FOR BACK GATE CONTROLLED SRAM WITH COEXISTING LOGIC DEVICES Public/Granted day:2008-10-23
Information query
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