发明授权
- 专利标题： Multiple zone carrier head with flexible membrane
- 专利标题（中）： 带有柔性膜的多区域载体头
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申请号： US11837412申请日： 2007-08-10
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公开(公告)号： US07842158B2公开(公告)日： 2010-11-30
- 发明人: Hung Chih Chen , Jeonghoon Oh , Tsz-Sin Siu , Thomas B. Brezoczky , Steven M. Zuniga
- 申请人： Hung Chih Chen , Jeonghoon Oh , Tsz-Sin Siu , Thomas B. Brezoczky , Steven M. Zuniga
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Fish & Richardson P.C.
- 主分类号： B24B29/00
- IPC分类号： B24B29/00
摘要：
A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base. The flexible membrane includes a central portion with an outer surface providing a substrate receiving surface, a perimeter portion connecting the central portion to the base, and at least one flap extending from an inner surface of the central portion. The flap divides a volume between the flexible membrane and the base into a plurality of chambers, and the flap includes a laterally extending first section and an angled second section extending beneath the first section and connecting the laterally extending first section to the central portion.
公开/授权文献
- US20070272356A1 MULTIPE ZONE CARRIER HEAD WITH FLEXIBLE MEMBRANE 公开/授权日：2007-11-29
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