发明授权
- 专利标题: Configurable prober for TFT LCD array test
- 专利标题(中): 可配置探针用于TFT LCD阵列测试
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申请号: US11940432申请日: 2007-11-15
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公开(公告)号: US07847566B2公开(公告)日: 2010-12-07
- 发明人: Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez (Frank) E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
- 申请人: Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez (Frank) E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Patterson & Sheridan, LLP
- 主分类号: G01R31/26
- IPC分类号: G01R31/26
摘要:
A method of testing electronic devices on substrates is described. The method includes placing a configurable prober over a first substrate, testing the first substrate, re-configuring the configurable prober, placing the configurable prober over a second substrate, and testing the second substrate.
公开/授权文献
- US20080061807A1 Configurable Prober for TFT LCD Array Test 公开/授权日:2008-03-13
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