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    Configurable prober for TFT LCD array testing
    1.
    发明授权
    Configurable prober for TFT LCD array testing 有权
    用于TFT LCD阵列测试的可配置探头

    公开(公告)号：US07319335B2

    公开(公告)日：2008-01-15

    申请号：US10889695

    申请日：2004-07-12

    申请人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez (Frank) E. Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

    发明人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez (Frank) E. Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

    IPC分类号： G01R31/305

    CPC分类号： G09G3/006 ,  G01R31/2893 ,  G01R31/305

    摘要： An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame.

    摘要翻译： 提供了一种用于电子设备测试系统的改进的探测器。 探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。 探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点 沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。 在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。 通常，玻璃基板是正方形的，框架也是正方形的。 以这种方式，“x”和“y”轴由框架定义。

    Configurable prober for TFT LCD array test
    4.
    发明申请
    Configurable prober for TFT LCD array test 有权
    可配置探针用于TFT LCD阵列测试

    公开(公告)号：US20050179452A1

    公开(公告)日：2005-08-18

    申请号：US10903216

    申请日：2004-07-30

    申请人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

    发明人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

    IPC分类号： G01R31/302 ,  G01R31/26 ,  G01R31/305 ,  G02F1/13 ,  G09G3/00 ,  H01L21/687

    CPC分类号： G01R1/07364 ,  G01R31/2893 ,  G01R31/305 ,  G09G3/006

    摘要： An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame. The electrical pins may be movable along the axial length of the prober bars, or may be selectively pushed down to contact selected contact pads on the substrate.

    摘要翻译： 提供了一种用于电子设备测试系统的改进的探测器。 探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。 探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点 沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。 在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。 通常，玻璃基板是正方形的，框架也是正方形的。 以这种方式，“x”和“y”轴由框架定义。 电引脚可以沿着探针杆的轴向长度移动，或者可以选择性地向下推动以接触衬底上的所选择的接触垫。

    Configurable prober for TFT LCD array testing
    5.
    发明申请
    Configurable prober for TFT LCD array testing 有权
    用于TFT LCD阵列测试的可配置探头

    公开(公告)号：US20050179451A1

    公开(公告)日：2005-08-18

    申请号：US10889695

    申请日：2004-07-12

    申请人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez Frank Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

    发明人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez Frank Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

    IPC分类号： G01R31/302 ,  G01R31/26 ,  G01R31/305 ,  G02F1/13 ,  G09G3/00 ,  H01L21/687

    CPC分类号： G09G3/006 ,  G01R31/2893 ,  G01R31/305

    摘要： An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame.

    摘要翻译： 提供了一种用于电子设备测试系统的改进的探测器。 探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。 探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点 沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。 在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。 通常，玻璃基板是正方形的，框架也是正方形的。 以这种方式，“x”和“y”轴由框架定义。

    Configurable prober for TFT LCD array test
    6.
    发明授权
    Configurable prober for TFT LCD array test 有权
    可配置探针用于TFT LCD阵列测试

    公开(公告)号：US07355418B2

    公开(公告)日：2008-04-08

    申请号：US10903216

    申请日：2004-07-30

    申请人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez E. Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

    发明人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez E. Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

    IPC分类号： G01R31/305

    CPC分类号： G01R1/07364 ,  G01R31/2893 ,  G01R31/305 ,  G09G3/006

    摘要： An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame. The electrical pins may be movable along the axial length of the prober bars, or may be selectively pushed down to contact selected contact pads on the substrate.

    摘要翻译： 提供了一种用于电子设备测试系统的改进的探测器。 探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。 探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点 沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。 在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。 通常，玻璃基板是正方形的，框架也是正方形的。 以这种方式，“x”和“y”轴由框架定义。 电引脚可以沿着探针杆的轴向长度移动，或者可以选择性地向下推动以接触衬底上的所选择的接触垫。

    Methods and apparatus for determining a position of a substrate relative to a support stage
    8.
    发明授权
    Methods and apparatus for determining a position of a substrate relative to a support stage 失效
    用于确定衬底相对于支撑台的位置的方法和装置

    公开(公告)号：US07372250B2

    公开(公告)日：2008-05-13

    申请号：US10782503

    申请日：2004-02-19

    申请人： Shinichi Kurita ,  Emanuel Beer ,  Edgar Kehrberg ,  Matthias Brunner

    发明人： Shinichi Kurita ,  Emanuel Beer ,  Edgar Kehrberg ,  Matthias Brunner

    IPC分类号： G01R31/02 ,  G01R31/28

    CPC分类号： H01L21/67265 ,  G03F7/707 ,  G03F7/70716 ,  G03F7/70775 ,  G03F7/70791 ,  G03F9/7011

    摘要： A sensing system includes a plurality of probes arranged in a spaced relation around a stage that is adapted to support a substrate. Each probe includes a detection portion adapted to move from a known starting position toward an edge of the substrate that is supported by the stage; detect the edge of the substrate while the substrate is supported by the stage; generate a detection signal following said detection; and stop moving toward the edge of the substrate following said detection. A controller may determine an edge position of the substrate relative to the stage based on the known starting position of each detection portion and based on the detection signal generated by each detection portion. Numerous other aspects are provided.

    摘要翻译： 感测系统包括围绕适于支撑衬底的平台间隔设置的多个探针。 每个探针包括适于从已知起始位置移动到由所述载物台支撑的所述基底的边缘的检测部分; 在衬底由载物台支撑的同时检测衬底的边缘; 在所述检测之后产生检测信号; 并且在所述检测之后停止移动到基板的边缘。 控制器可以基于每个检测部分的已知开始位置并且基于由每个检测部分生成的检测信号来确定基板相对于载物台的边缘位置。 提供了许多其他方面。