发明授权
- 专利标题: Nanoindentation surface analysis method
- 专利标题(中): 纳米压痕表面分析法
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申请号: US12251136申请日: 2008-10-14
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公开(公告)号: US07849731B2公开(公告)日: 2010-12-14
- 发明人: Richard L. Bradshaw , Bernd W. Gotsmann , Urs T. Duerig
- 申请人: Richard L. Bradshaw , Bernd W. Gotsmann , Urs T. Duerig
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 Dan Shifrin
- 主分类号: G01N3/42
- IPC分类号: G01N3/42
摘要:
The present invention provides a novel method for determining the mechanical properties of the surfaces of materials including thin films. Generally, the method is comprised of laterally scanning the surface of the film with an array of cantilever tips varying temperature, load and time to obtain a measurement of mechanical properties, such as hardness and glass transition temperature. The method can be used to obtain mechanical properties of films that would otherwise be unobtainable using standard methods.
公开/授权文献
- US20090120172A1 NANOINDENTATION SURFACE ANALYSIS METHOD 公开/授权日:2009-05-14
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