发明授权
US07851865B2 Fin-type field effect transistor structure with merged source/drain silicide and method of forming the structure
有权
具有合并源极/漏极硅化物的鳍型场效应晶体管结构和形成结构的方法
- 专利标题: Fin-type field effect transistor structure with merged source/drain silicide and method of forming the structure
- 专利标题(中): 具有合并源极/漏极硅化物的鳍型场效应晶体管结构和形成结构的方法
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申请号: US11873521申请日: 2007-10-17
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公开(公告)号: US07851865B2公开(公告)日: 2010-12-14
- 发明人: Brent A. Anderson , Andres Bryant , John J. Ellis-Monaghan , Edward J. Nowak
- 申请人: Brent A. Anderson , Andres Bryant , John J. Ellis-Monaghan , Edward J. Nowak
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Gibb I.P. Law Firm, LLC
- 主分类号: H01L29/78
- IPC分类号: H01L29/78
摘要:
Disclosed herein are embodiments of a design structure of a multiple fin fin-type field effect transistor (i.e., a multiple fin dual-gate or tri-gate field effect transistor) in which the multiple fins are partially or completely merged by a highly conductive material (e.g., a metal silicide). Merging the fins in this manner allow series resistance to be minimized with little, if any, increase in the parasitic capacitance between the gate and source/drain regions. Merging the semiconductor fins in this manner also allows each of the source/drain regions to be contacted by a single contact via as well as more flexible placement of that contact via.
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