发明授权
- 专利标题： Piezoceramic multilayer actuator manufactured according to particular sintering parameters and corresponding method of manufacturing
- 专利标题（中）： 按照特定烧结参数制造的压电陶瓷多层致动器及相应的制造方法
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申请号： US12032465申请日： 2008-02-15
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公开(公告)号： US07851974B2公开(公告)日： 2010-12-14
- 发明人: Bernhard Döllgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
- 申请人： Bernhard Döllgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
- 申请人地址： DE Munich
- 专利权人： Siemens Aktiengesellschaft
- 当前专利权人： Siemens Aktiengesellschaft
- 当前专利权人地址： DE Munich
- 代理机构： King & Spalding L.L.P.
- 优先权： EP07003445 20070219
- 主分类号： H01L41/04
- IPC分类号： H01L41/04 ; H01L41/08
摘要：
A piezoceramic multilayer actuator (10) has a plurality of piezoceramic layers (12), a security layer (20) and a plurality of inner electrodes (16, 18). The piezoceramic layers (12) has a piezoceramic first material sintered at a sintering temperature. The security layer (20) has a second material and is disposed between two piezoceramic layers (12). Each of the plurality of inner electrodes (16, 18) has a third material and is deposited between two piezoceramic layers (12). The degree of sintering of the second material is lower than the degree of sintering of the third material.