Invention Grant
- Patent Title: Microresonator
- Patent Title (中): 微谐振器
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Application No.: US12266471Application Date: 2008-11-06
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Publication No.: US07858407B2Publication Date: 2010-12-28
- Inventor: Nicolas Abelé , Pascal Ancey , Alexandre Talbot , Karim Segueni , Guillaume Bouche , Thomas Skotnicki , Stéphane Monfray , Fabrice Casset
- Applicant: Nicolas Abelé , Pascal Ancey , Alexandre Talbot , Karim Segueni , Guillaume Bouche , Thomas Skotnicki , Stéphane Monfray , Fabrice Casset
- Agency: Wolf, Greenfield & Sacks, P.C.
- Agent Lisa K. Jorgenson; William R. McClelland
- Priority: FR0550276 20050131
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H02N2/00
Abstract:
A microresonator comprising a single-crystal silicon resonant element and at least one activation electrode placed close to the resonant element, in which the resonant element is placed in an opening of a semiconductor layer covering a substrate, the activation electrode being formed in the semiconductor layer and being level at the opening.
Public/Granted literature
- US20090152998A1 MICRORESONATOR Public/Granted day:2009-06-18
Information query
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