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    Electromechanical resonator and method for fabricating such a resonator
    5.
    发明申请
    Electromechanical resonator and method for fabricating such a resonator 有权
    机电谐振器及其制造方法

    公开(公告)号：US20050199970A1

    公开(公告)日：2005-09-15

    申请号：US10895616

    申请日：2004-07-21

    申请人： Stephane Monfray ,  Pascal Ancey ,  Thomas Skotnicki ,  Karim Segueni

    发明人： Stephane Monfray ,  Pascal Ancey ,  Thomas Skotnicki ,  Karim Segueni

    IPC分类号： B81B3/00 ,  H03H9/24 ,  H01L27/14

    CPC分类号： H03H9/2405 ,  H03H2009/02511

    摘要： An electromechanical resonator includes a monocrystalline-silicon substrate (S) provided with an active zone (ZA) delimited by an insulating region, a vibrating beam (10) anchored by at least one of its free ends on the insulating region and including a monocrystalline-silicon vibrating central part (12), and a control electrode (E) arranged above the beam and bearing on the active zone. The central part (12) of the beam is separated from the active zone (ZA) and from the control electrode (E).

    摘要翻译： 机电谐振器包括设置有由绝缘区限定的有源区（ZA）的单晶硅衬底（S），由绝缘区上的至少一个自由端锚定的振动束（10），并且包括单晶硅衬底 硅振动中心部分（12）和布置在梁的上方并且承载在活动区上的控制电极（E）。 光束的中心部分（12）与有源区（ZA）和控制电极（E）分离。

    Electromechanical resonator and method for fabricating such a resonator
    6.
    发明授权
    Electromechanical resonator and method for fabricating such a resonator 有权
    机电谐振器及其制造方法

    公开(公告)号：US07196451B2

    公开(公告)日：2007-03-27

    申请号：US10895616

    申请日：2004-07-21

    申请人： Stephane Monfray ,  Pascal Ancey ,  Thomas Skotnicki ,  Karim Segueni

    发明人： Stephane Monfray ,  Pascal Ancey ,  Thomas Skotnicki ,  Karim Segueni

    IPC分类号： H02N1/00

    CPC分类号： H03H9/2405 ,  H03H2009/02511

    摘要： An electromechanical resonator includes a monocrystalline-silicon substrate (S) provided with an active zone (ZA) delimited by an insulating region, a vibrating beam (10) anchored by at least one of its free ends on the insulating region and including a monocrystalline-silicon vibrating central part (12), and a control electrode (E) arranged above the beam and bearing on the active zone. The central part (12) of the beam is separated from the active zone (ZA) and from the control electrode (E).

    摘要翻译： 机电谐振器包括设置有由绝缘区限定的有源区（ZA）的单晶硅衬底（S），由绝缘区上的至少一个自由端锚定的振动束（10），并且包括单晶硅衬底 硅振动中心部分（12）和布置在梁的上方并且承载在活动区上的控制电极（E）。 光束的中心部分（12）与有源区（ZA）和控制电极（E）分离。

    Microelectromechanical system comprising a beam that undergoes flexural deformation
    7.
    发明申请
    Microelectromechanical system comprising a beam that undergoes flexural deformation 审中-公开
    微机电系统包括经受弯曲变形的梁

    公开(公告)号：US20070035200A1

    公开(公告)日：2007-02-15

    申请号：US11388213

    申请日：2006-03-23

    申请人： Fabrice Casset ,  Karim Segueni ,  Arnaud De Grave ,  Nicolas Abele

    发明人： Fabrice Casset ,  Karim Segueni ,  Arnaud De Grave ,  Nicolas Abele

    IPC分类号： H01H57/00 ,  C23F1/00 ,  H02N1/00

    CPC分类号： H03H9/2463 ,  B81B3/007 ,  B81B2201/016 ,  B81B2201/0271 ,  B81B2203/0118 ,  H03H3/0076 ,  H03H9/2447

    摘要： A microelectromechanical system comprises a beam and an electrode coupled to the beam via electrostatic interaction. The beam is designed to undergo elastic flexural deformation and has an approximately constant cross section. The beam consists of several flat faces that extend over the length of the beam, each having a thickness of less than an external dimension of the cross section. A flexural vibration frequency of the beam is then increased compared with a solid beam of the same external dimensions. Such a microelectromechanical system is suitable for applications requiring very short transition times, or for producing high-frequency oscillators and resonators.

    摘要翻译： 微机电系统包括通过静电相互作用耦合到束的光束和电极。 梁被设计成经历弹性弯曲变形并且具有大致恒定的横截面。 梁包括在梁的长度上延伸的多个平面，每个平面具有小于横截面的外部尺寸的厚度。 然后与相同外部尺寸的实心束相比，梁的弯曲振动频率增加。 这样的微机电系统适用于需要非常短的转换时间或用于产生高频振荡器和谐振器的应用。

    Micro-electromechanical resonance device with periodic structure
    8.
    发明授权
    Micro-electromechanical resonance device with periodic structure 有权
    具有周期性结构的微机电共振装置

    公开(公告)号：US08212324B2

    公开(公告)日：2012-07-03

    申请号：US12419125

    申请日：2009-04-06

    申请人： Gregory Caruyer ,  Karim Segueni ,  Pascal Ancey ,  Bertrand Dubus

    发明人： Gregory Caruyer ,  Karim Segueni ,  Pascal Ancey ,  Bertrand Dubus

    IPC分类号： H01L29/84 ,  H01L21/00

    CPC分类号： H03H9/02338 ,  H03H9/02433 ,  H03H9/2436 ,  H03H9/2463

    摘要： A Micro Electro Mechanical Systems resonance device includes a substrate, and an input electrode, connected to an alternating current source having an input frequency. The device also includes an output electrode, and at least one anchoring structure, connected to the substrate. The device further includes a vibratile structure connected to an anchoring structure by at least one junction, having a natural acoustic resonant frequency. The vibration under the effect of the input electrode, when it is powered, generates, on the output electrode, an alternating current wherein the output frequency is equal to the natural frequency. The vibratile structure and/or the anchoring structure includes a periodic structure. The periodic structure includes at least first and second zones different from each other, and corresponding respectively to first and second acoustic propagation properties.

    摘要翻译： 微机电系统谐振装置包括连接到具有输入频率的交流电源的基板和输入电极。 该装置还包括输出电极和连接到基板的至少一个锚定结构。 该装置还包括通过至少一个接头连接到锚固结构的振动结构，具有自然的声共振频率。 在输入电极的作用下，在输入电极的作用下的振动在输出电极上产生交流电流，其中输出频率等于固有频率。 振动结构和/或锚定结构包括周期性结构。 周期性结构至少包括彼此不同的第一和第二区，并且分别对应于第一和第二声学传播特性。

    MICRO-ELECTROMECHANICAL RESONANCE DEVICE WITH PERIODIC STRUCTURE
    9.
    发明申请
    MICRO-ELECTROMECHANICAL RESONANCE DEVICE WITH PERIODIC STRUCTURE 有权
    具有周期结构的微机电谐振器件

    公开(公告)号：US20090289314A1

    公开(公告)日：2009-11-26

    申请号：US12419125

    申请日：2009-04-06

    申请人： Gregory CARUYER ,  Karim Segueni ,  Pascal Ancey ,  Bertrand Dubus

    发明人： Gregory CARUYER ,  Karim Segueni ,  Pascal Ancey ,  Bertrand Dubus

    IPC分类号： H01L29/84 ,  H01L21/30

    CPC分类号： H03H9/02338 ,  H03H9/02433 ,  H03H9/2436 ,  H03H9/2463

    摘要： A Micro Electro Mechanical Systems resonance device includes a substrate, and an input electrode, connected to an alternating current source having an input frequency. The device also includes an output electrode, and at least one anchoring structure, connected to the substrate. The device further includes a vibratile structure connected to an anchoring structure by at least one junction, having a natural acoustic resonant frequency. The vibration under the effect of the input electrode, when it is powered, generates, on the output electrode, an alternating current wherein the output frequency is equal to the natural frequency. The vibratile structure and/or the anchoring structure includes a periodic structure. The periodic structure includes at least first and second zones different from each other, and corresponding respectively to first and second acoustic propagation properties.

    摘要翻译： 微机电系统谐振装置包括连接到具有输入频率的交流电源的基板和输入电极。 该装置还包括输出电极和连接到基板的至少一个锚定结构。 该装置还包括通过至少一个接头连接到锚固结构的振动结构，具有自然的声共振频率。 在输入电极的作用下，在输入电极的作用下的振动在输出电极上产生交流电流，其中输出频率等于固有频率。 振动结构和/或锚定结构包括周期性结构。 周期性结构至少包括彼此不同的第一和第二区，并且分别对应于第一和第二声学传播特性。

    MEMS structure with a flexible membrane and improved electric actuation means
    10.
    发明授权
    MEMS structure with a flexible membrane and improved electric actuation means 失效
    具有柔性膜的MEMS结构和改进的电致动装置

    公开(公告)号：US08593239B2

    公开(公告)日：2013-11-26

    申请号：US13203884

    申请日：2010-03-18

    申请人： Karim Segueni ,  Nicolas Lorphelin

    发明人： Karim Segueni ,  Nicolas Lorphelin

    IPC分类号： H01H51/22

    CPC分类号： H01H59/0009 ,  B81B5/00 ,  B81B2201/018

    摘要： The MEMS structure comprises: a flexible membrane (6), which has a main longitudinal axis (6a) defining a longitudinal direction (X), at least one pillar (3, 3′) under the flexible membrane (6), electric lowering actuation means (7) that are adapted to bend down the flexible membrane (6) into a down forced state electric raising actuation means (8) that are adapted to bend up the flexible membrane (6) into an up forced state. The electric lowering actuation means (7) or the electric raising actuation means (8) comprise an actuation area (7c or 8c), that extends under a part of the membrane (6) and that is adapted to exert pulling forces on the membrane (6) simultaneously on both sides of the said at least one pillar (3) in the longitudinal direction (X).

    摘要翻译： MEMS结构包括：柔性膜（6），其具有限定纵向（X）的主纵向轴线（6a），在柔性膜（6）下方的至少一个柱体（3,3'），电降压致动 适于将柔性膜（6）向下弯曲成适于将柔性膜（6）弯曲成向上强制状态的向下强制状态电动致动装置（8）的装置（7）。 电降落致动装置（7）或电动致动装置（8）包括致动区域（7c或8c），其在膜（6）的一部分下延伸并且适于在膜上施加拉力 6）同时在所述至少一个支柱（3）的纵向（X）上的两侧。