Invention Grant
US07858466B2 Different-voltage device manufactured by a CMOS compatible process and high-voltage device used in the different-voltage device
有权
由CMOS兼容工艺制造的不同电压器件和用于不同电压器件的高压器件
- Patent Title: Different-voltage device manufactured by a CMOS compatible process and high-voltage device used in the different-voltage device
- Patent Title (中): 由CMOS兼容工艺制造的不同电压器件和用于不同电压器件的高压器件
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Application No.: US11682621Application Date: 2007-03-06
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Publication No.: US07858466B2Publication Date: 2010-12-28
- Inventor: Chih-Feng Huang , Ta-yung Yang , Jenn-yu G. Lin , Tuo-Hsin Chien
- Applicant: Chih-Feng Huang , Ta-yung Yang , Jenn-yu G. Lin , Tuo-Hsin Chien
- Applicant Address: TW Taipei Hsien
- Assignee: System General Corp.
- Current Assignee: System General Corp.
- Current Assignee Address: TW Taipei Hsien
- Agency: J.C. Patents
- Main IPC: H01L21/8238
- IPC: H01L21/8238

Abstract:
A method of manufacturing different-voltage devices mainly comprises forming at least one high-voltage well in high-voltage device regions, at least one N-well in low-voltage device regions, at least one P-well in low-voltage device regions, source/drain wells in high-voltage device regions, and isolation wells in isolation regions in a p-type substrate. The breakdown voltage is adjusted by modulating the ion doping profile. Furthermore, parameters of implanting conductive ions are adjusted for implanting conductive ions into both high-voltage device regions and low-voltage device regions. The isolation wells formed in isolation regions between devices are for separating device formed over high-voltage device regions and device formed over low-voltage device regions. The thickness of a HV gate oxide layer is thicker than the thickness of an LV gate oxide layer for modulating threshold voltages of high-voltage devices and low-voltage devices.
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