Invention Grant
- Patent Title: Additional metal routing in semiconductor devices
- Patent Title (中): 半导体器件中的附加金属布线
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Application No.: US11331951Application Date: 2006-01-13
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Publication No.: US07859112B2Publication Date: 2010-12-28
- Inventor: Terry McDaniel , James Green , Mark Fischer
- Applicant: Terry McDaniel , James Green , Mark Fischer
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Main IPC: H01L23/52
- IPC: H01L23/52

Abstract:
Memory devices, such as DRAM memory devices, may include one or more metal layers above a local interconnect of the DRAM memory that make contact to lower gate regions of the memory device. As the size of semiconductor components decreases and circuit densities increase, the density of the metal routing in these upper metal layers becomes increasingly difficult to fabricate. By providing additional metal routing in the lower gate regions that may be coupled to the upper metal layers, the spacing requirements of the upper metal layers may be eased, while maintaining the size of the semiconductor device. In addition, the additional metal routing formed in the gate regions of the memory devices may be disposed parallel to other metal contacts in a strapping configuration, thus reducing a resistance of the metal contacts, such as buried digit lines of a DRAM memory cell.
Public/Granted literature
- US20070164372A1 Systems and methods for forming additional metal routing in semiconductor devices Public/Granted day:2007-07-19
Information query
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