发明授权
- 专利标题: Methodology for image fidelity verification
- 专利标题(中): 图像保真度验证方法
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申请号: US11942309申请日: 2007-11-19
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公开(公告)号: US07860701B2公开(公告)日: 2010-12-28
- 发明人: Ioana Graur , Kafai Lai , Rama N. Singh
- 申请人: Ioana Graur , Kafai Lai , Rama N. Singh
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: DeLio & Peterson, LLC
- 代理商 Peter W. Peterson
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
A method for predicting functionality of an integrated circuit segment to be lithographically printed on a wafer. Initially there is provided a two-dimensional design of an integrated circuit, including an integrated circuit segment having critical width, and a two-dimensional printed image of the critical width integrated circuit segment is simulated. The method then includes determining a ratio of perimeters or areas of the designed critical width integrated circuit segment to the simulated printed critical width integrated circuit segment, and predicting functionality of the critical width integrated circuit segment after printing based on the ratio of perimeters or areas.
公开/授权文献
- US20080071512A1 METHODOLOGY FOR IMAGE FIDELITY VERIFICATION 公开/授权日:2008-03-20
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