发明授权
- 专利标题： Method and device for the operation of a plasma device
- 专利标题（中）： 用于等离子体装置操作的方法和装置
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申请号： US11792740申请日： 2005-12-09
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公开(公告)号： US07869556B2公开(公告)日： 2011-01-11
- 发明人: Gregor Morfill , Uwe Konopka , Hubertus M. Thomas , Wolfgang Jacob , Beatrice Annaratone , Martin Fink , Noriyoshi Sato , Tetsuji Shimizu , Timo Stuffler
- 申请人： Gregor Morfill , Uwe Konopka , Hubertus M. Thomas , Wolfgang Jacob , Beatrice Annaratone , Martin Fink , Noriyoshi Sato , Tetsuji Shimizu , Timo Stuffler
- 申请人地址： DE
- 专利权人： Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- 当前专利权人： Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- 当前专利权人地址： DE
- 代理机构： DLA Piper LLP (US)
- 优先权： DE102004060377 20041215
- 国际申请： PCT/EP2005/013233 WO 20051209
- 国际公布： WO2006/063738 WO 20060622
- 主分类号： H05H1/18
- IPC分类号： H05H1/18
摘要：
A method for the operation of a plasma device (100) is described in which particles (2) are arranged in a plasma, wherein a generation of electric travelling waves (1) is provided, under whose effective action the particles (2) in the plasma device (100) perform a directed movement to at least one pre-determined collection area (20, 20A). A plasma device for carrying out the method is also described.
公开/授权文献
- US20080136332A1 Method and Device For the Operation of a Plasma Device 公开/授权日：2008-06-12
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