Invention Grant
- Patent Title: Ion beam guide tube
- Patent Title (中): 离子束导管
-
Application No.: US11907403Application Date: 2007-10-11
-
Publication No.: US07872247B2Publication Date: 2011-01-18
- Inventor: Geoffrey Ryding , Gregory Robert Alcott , Lee Spraggon , Robert Mitchell , Martin Hilkene , Matthew Castle , Marvin Farley
- Applicant: Geoffrey Ryding , Gregory Robert Alcott , Lee Spraggon , Robert Mitchell , Martin Hilkene , Matthew Castle , Marvin Farley
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Boult Wade Tennant
- Main IPC: H01J37/317
- IPC: H01J37/317 ; H01L21/265
Abstract:
A guide tube for an ion beam in an ion implanter which is located adjacent a semiconductor wafer being implanted has an outwardly tapering central bore, thereby alleviating problems of beam strike as the ion beam passes through the guide tube.
Public/Granted literature
- US20090095916A1 Ion beam guide tube Public/Granted day:2009-04-16
Information query
