发明授权
US07878883B2 Wire saw ingot slicing system and method with ingot preheating, web preheating, slurry temperature control and/or slurry flow rate control
失效
线锯锭切割系统和方法,其具有锭预热,幅材预热,浆料温度控制和/或浆料流速控制
- 专利标题: Wire saw ingot slicing system and method with ingot preheating, web preheating, slurry temperature control and/or slurry flow rate control
- 专利标题(中): 线锯锭切割系统和方法,其具有锭预热,幅材预热,浆料温度控制和/或浆料流速控制
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申请号: US11621920申请日: 2007-01-10
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公开(公告)号: US07878883B2公开(公告)日: 2011-02-01
- 发明人: Puneet Gupta , Milind S. Kulkarni , Carlo Zavattari , Roland R. Vandamme
- 申请人: Puneet Gupta , Milind S. Kulkarni , Carlo Zavattari , Roland R. Vandamme
- 申请人地址: US MO St. Peters
- 专利权人: MEMC Electronics Materials, Inc.
- 当前专利权人: MEMC Electronics Materials, Inc.
- 当前专利权人地址: US MO St. Peters
- 代理机构: Armstrong Teasdale LLP
- 主分类号: B24B49/00
- IPC分类号: B24B49/00 ; B28D1/08
摘要:
A system and method for slicing an ingot into wafers using the wire saw process. A slurry collection system collects and supplies slurry to a slurry handling system for controlling temperatures and/or flow rates of the slurry thereby providing slurry output at a controlled temperature and/or a controlled flow rate to slicing system for cutting the ingot, which may be preheated.