Invention Grant
- Patent Title: Interferometry for determining characteristics of an object surface, with spatially coherent illumination
- Patent Title (中): 用于确定物体表面特征的干涉测量,具有空间相干照明
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Application No.: US11758252Application Date: 2007-06-05
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Publication No.: US07884947B2Publication Date: 2011-02-08
- Inventor: Xavier Colonna De Lega , Peter De Groot
- Applicant: Xavier Colonna De Lega , Peter De Groot
- Applicant Address: US CT Middlefield
- Assignee: Zygo Corporation
- Current Assignee: Zygo Corporation
- Current Assignee Address: US CT Middlefield
- Agency: Fish & Richardson P.C.
- Main IPC: G01B11/02
- IPC: G01B11/02

Abstract:
Disclosed is an apparatus which includes: an interferometer configured to direct broadband spatially coherent test light to a test surface of a test object over a range of illumination angles and subsequently combine it with reference light to form an interference pattern, the test and reference light being derived from a common source; and multi-element detector; and one or more optics configured to direct at least a portion of the combined light to the detector so that different elements of the detector correspond to different illumination angles of a region of the test surface illuminated by the test light.
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