Invention Grant
US07884947B2 Interferometry for determining characteristics of an object surface, with spatially coherent illumination 有权
用于确定物体表面特征的干涉测量,具有空间相干照明

Interferometry for determining characteristics of an object surface, with spatially coherent illumination
Abstract:
Disclosed is an apparatus which includes: an interferometer configured to direct broadband spatially coherent test light to a test surface of a test object over a range of illumination angles and subsequently combine it with reference light to form an interference pattern, the test and reference light being derived from a common source; and multi-element detector; and one or more optics configured to direct at least a portion of the combined light to the detector so that different elements of the detector correspond to different illumination angles of a region of the test surface illuminated by the test light.
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