发明授权
- 专利标题: Reducing coherent crosstalk in dual-beam laser processing system
- 专利标题(中): 减少双光束激光加工系统的相干串扰
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申请号: US11496871申请日: 2006-07-31
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公开(公告)号: US07888620B2公开(公告)日: 2011-02-15
- 发明人: Douglas Earl Holmgren , Ho Wai Lo , Philip Mitchell Conklin
- 申请人: Douglas Earl Holmgren , Ho Wai Lo , Philip Mitchell Conklin
- 申请人地址: US OR Portland
- 专利权人: Electro Scientific Industries, Inc.
- 当前专利权人: Electro Scientific Industries, Inc.
- 当前专利权人地址: US OR Portland
- 代理机构: Stoel Rives LLP
- 主分类号: B23K26/00
- IPC分类号: B23K26/00 ; G01B11/02
摘要:
A method of and system for forming two laser processing beams with controlled stability at a target specimen work surface includes first and second mutually coherent laser beams propagating along separate first and second beam paths that are combined to perform an optical property adjustment. The combined laser beams are separated into third and fourth laser beams propagating along separate beam paths and including respective third and fourth main beam components, and one of the third and fourth laser beams contributes a leakage component that copropagates in mutual temporal coherence with the main beam component of the other of the third and fourth laser beams. An effect of mutual temporal coherence of the leakage component and the other main beam component with which the leakage component copropagates is reduced through acousto-optic modulation frequency shifts or through incorporation of an optical path length difference in the two beams.
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