发明授权
US07892635B2 Precursors for porous low-dielectric constant materials for use in electronic devices 有权
用于电子设备的多孔低介电常数材料的前体

Precursors for porous low-dielectric constant materials for use in electronic devices
摘要:
Precursors are provided for dielectric compositions that are useful in the manufacture of electronic devices such as integrated circuit devices and integrated circuit packaging devices. The dielectric compositions are prepared by crosslinking a thermally decomposable porogen to a host polymer via a coupling agent, followed by heating to a temperature suitable to decompose the porogen. The porous materials that result have dielectric constants of less than 2.4.
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