发明授权
- 专利标题： Method for making multi-crystalline film of solar cell
- 专利标题（中）： 制造太阳能电池多晶膜的方法
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申请号： US11980769申请日： 2007-10-31
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公开(公告)号： US07892953B2公开(公告)日： 2011-02-22
- 发明人: Tsun-Neng Yang , Shan-Ming Lan , Chin-Chen Chiang , Wei-Yang Ma , Chien-Te Ku , Yu-Hsiang Huang
- 申请人： Tsun-Neng Yang , Shan-Ming Lan , Chin-Chen Chiang , Wei-Yang Ma , Chien-Te Ku , Yu-Hsiang Huang
- 申请人地址： TW Taoyuan
- 专利权人： Atomic Energy Council-Institute of Nuclear Energy Research
- 当前专利权人： Atomic Energy Council-Institute of Nuclear Energy Research
- 当前专利权人地址： TW Taoyuan
- 代理机构： Jackson IPG PLLC
- 代理商 Demian K. Jackson
- 主分类号： H01L21/20
- IPC分类号： H01L21/20
摘要：
A method is disclosed to make a multi-crystalline silicon film of a solar cell. The method includes the step of providing a ceramic substrate, the step of providing a titanium-based film on the ceramic substrate, the step of providing a p+-type back surface field layer on the titanium-based film, the step of providing a p−-type light-soaking layer on the p+-type back surface field layer and the step of conducting n+-type diffusive deposition of phosphine on the p−-type light-soaking layer based on atmospheric pressure chemical vapor deposition, thus forming an n+-type emitter on the p−-type light-soaking layer.
公开/授权文献
- US20100261305A1 Method for making multi-cystalline film of solar cell 公开/授权日：2010-10-14
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