Invention Grant
- Patent Title: Vertical-type, integrated bipolar device and manufacturing process thereof
- Patent Title (中): 垂直型,集成双极型器件及其制造工艺
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Application No.: US11779681Application Date: 2007-07-18
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Publication No.: US07898008B2Publication Date: 2011-03-01
- Inventor: Piero Giorgio Fallica , Roberto Modica
- Applicant: Piero Giorgio Fallica , Roberto Modica
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Agent Lisa K. Jorgenson; Joshua A. Kading
- Priority: ITTO2006A0525 20060718
- Main IPC: H01L21/70
- IPC: H01L21/70

Abstract:
A bipolar device is integrated in an active layer, wherein delimitation trenches surround respective active areas housing bipolar transistors of complementary types. Each active area accommodates a buried layer; a well region extending on top of the buried layer; a top sinker region extending between the surface of the device and the well region; a buried collector region extending on top of the well region and laterally with respect to the top sinker region; a base region, extending on top of the buried collector region laterally with respect to the top sinker region; and an emitter region extending inside the base region. The homologous regions of the complementary transistors have a similar doping level, being obtained by ion-implantation of epitaxial layers wherein the concentration of dopant added during the growth is very low, possibly zero.
Public/Granted literature
- US20080017895A1 VERTICAL-TYPE, INTEGRATED BIPOLAR DEVICE AND MANUFACTURING PROCESS THEREOF Public/Granted day:2008-01-24
Information query
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