Invention Grant
US07902014B2 CMOS devices with a single work function gate electrode and method of fabrication
有权
CMOS器件具有单功能功能的栅电极和制造方法
- Patent Title: CMOS devices with a single work function gate electrode and method of fabrication
- Patent Title (中): CMOS器件具有单功能功能的栅电极和制造方法
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Application No.: US11649545Application Date: 2007-01-03
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Publication No.: US07902014B2Publication Date: 2011-03-08
- Inventor: Brian S. Doyle , Been-Yih Jin , Jack T. Kavalieros , Suman Datta , Justin K. Brask , Robert S. Chau
- Applicant: Brian S. Doyle , Been-Yih Jin , Jack T. Kavalieros , Suman Datta , Justin K. Brask , Robert S. Chau
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: H01L21/8234
- IPC: H01L21/8234

Abstract:
Described herein are a device utilizing a gate electrode material with a single work function for both the pMOS and nMOS transistors where the magnitude of the transistor threshold voltages is modified by semiconductor band engineering and article made thereby. Further described herein are methods of fabricating a device formed of complementary (pMOS and nMOS) transistors having semiconductor channel regions which have been band gap engineered to achieve a low threshold voltage.
Public/Granted literature
- US20070111419A1 CMOS Devices with a single work function gate electrode and method of fabrication Public/Granted day:2007-05-17
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