发明授权
US07902014B2 CMOS devices with a single work function gate electrode and method of fabrication
有权
CMOS器件具有单功能功能的栅电极和制造方法
- 专利标题: CMOS devices with a single work function gate electrode and method of fabrication
- 专利标题(中): CMOS器件具有单功能功能的栅电极和制造方法
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申请号: US11649545申请日: 2007-01-03
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公开(公告)号: US07902014B2公开(公告)日: 2011-03-08
- 发明人: Brian S. Doyle , Been-Yih Jin , Jack T. Kavalieros , Suman Datta , Justin K. Brask , Robert S. Chau
- 申请人: Brian S. Doyle , Been-Yih Jin , Jack T. Kavalieros , Suman Datta , Justin K. Brask , Robert S. Chau
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Blakely, Sokoloff, Taylor & Zafman LLP
- 主分类号: H01L21/8234
- IPC分类号: H01L21/8234
摘要:
Described herein are a device utilizing a gate electrode material with a single work function for both the pMOS and nMOS transistors where the magnitude of the transistor threshold voltages is modified by semiconductor band engineering and article made thereby. Further described herein are methods of fabricating a device formed of complementary (pMOS and nMOS) transistors having semiconductor channel regions which have been band gap engineered to achieve a low threshold voltage.
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