发明授权
- 专利标题: Gated nanorod field emitter structures and associated methods of fabrication
- 专利标题(中): 门极纳米棒场发射极结构及相关制造方法
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申请号: US11971452申请日: 2008-01-09
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公开(公告)号: US07902736B2公开(公告)日: 2011-03-08
- 发明人: Heather Diane Hudspeth , Ji Ung Lee , Reed Roeder Corderman , Anping Zhang , Renee Bushey Rohling , Lauraine Denault , Joleyn Eileen Balch
- 申请人: Heather Diane Hudspeth , Ji Ung Lee , Reed Roeder Corderman , Anping Zhang , Renee Bushey Rohling , Lauraine Denault , Joleyn Eileen Balch
- 申请人地址: US NY Niskayuna
- 专利权人: General Electric Company
- 当前专利权人: General Electric Company
- 当前专利权人地址: US NY Niskayuna
- 代理商 Paul J. DiConza
- 主分类号: H01J1/62
- IPC分类号: H01J1/62
摘要:
The present invention relates to gated nanorod field emission devices, wherein such devices have relatively small emitter tip-to-gate distances, thereby providing a relatively high emitter tip density and low turn on voltage. Such methods employ a combination of traditional device processing techniques (lithography, etching, etc.) with electrochemical deposition of nanorods. These methods are relatively simple, cost-effective, and efficient; and they provide field emission devices that are suitable for use in x-ray imaging applications, lighting applications, flat panel field emission display (FED) applications, etc.
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