发明授权
- 专利标题: Reflective mask blank for EUV lithography
- 专利标题(中): EUV光刻用反光罩
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申请号: US12205967申请日: 2008-09-08
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公开(公告)号: US07906259B2公开(公告)日: 2011-03-15
- 发明人: Kazuyuki Hayashi , Kazuo Kadowaki , Takashi Sugiyama , Masaki Mikami
- 申请人: Kazuyuki Hayashi , Kazuo Kadowaki , Takashi Sugiyama , Masaki Mikami
- 申请人地址: JP Tokyo
- 专利权人: Asahi Glass Company, Limited
- 当前专利权人: Asahi Glass Company, Limited
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2006-117992 20060421
- 主分类号: G03F1/00
- IPC分类号: G03F1/00
摘要:
To provide a reflective mask blank for EUV lithography having an absorber layer, which presents a low reflectance to a light in the wavelength ranges of EUV light and pattern inspection light, and which is easily controlled to have desired film composition and film thickness. A reflective mask blank for EUV lithography, comprising a substrate, and a reflective layer for reflecting EUV light and an absorber layer for absorbing EUV light formed in this order on the substrate, wherein the absorber layer contains tantalum (Ta), boron (B), silicon (Si) and nitrogen (N), and in the absorber layer, the B content is at least 1 at % and less than 5 at %, the Si content is from 1 to 25 at %, and the compositional ratio of Ta to N (Ta:N) is from 8:1 to 1:1.
公开/授权文献
- US20090011341A1 REFLECTIVE MASK BLANK FOR EUV LITHOGRAPHY 公开/授权日:2009-01-08