发明授权
- 专利标题: Luminous body, electron beam detector using the same, scanning electron microscope, and mass analysis device
- 专利标题(中): 发光体,电子束检测器,扫描电子显微镜和质量分析装置
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申请号: US11547807申请日: 2005-04-07
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公开(公告)号: US07910895B2公开(公告)日: 2011-03-22
- 发明人: Shoichi Uchiyama , Yasufumi Takagi , Minoru Niigaki , Minoru Kondo , Itaru Mizuno
- 申请人: Shoichi Uchiyama , Yasufumi Takagi , Minoru Niigaki , Minoru Kondo , Itaru Mizuno
- 申请人地址: JP Hamamatsu-shi, Shizuoka
- 专利权人: Hamamatsu Photonics K.K.
- 当前专利权人: Hamamatsu Photonics K.K.
- 当前专利权人地址: JP Hamamatsu-shi, Shizuoka
- 代理机构: Drinker Biddle & Reath LLP
- 优先权: JP2004-114596 20040408
- 国际申请: PCT/JP2005/006870 WO 20050407
- 国际公布: WO2005/097945 WO 20051020
- 主分类号: H01J49/02
- IPC分类号: H01J49/02
摘要:
A light-emitting body of rapid speed of response and high light emission intensity, and an electron beam detector, scanning electron microscope and mass spectroscope using this are provided. In the light-emitting body 10 according to the present invention, when fluorescence is emitted by a nitride semiconductor layer 14 formed on one face 12a of a substrate 12 in response to incidence of electrons, at least some of this fluorescence is transmitted through this substrate 12, whereby that fluorescence is emitted from the other face 12b of the substrate. The response speed of this fluorescence is not more than μsec order. Also, the intensity of emission of this fluorescence is almost identical to that of a conventional P47 phosphor. Specifically, with this light-emitting body 10, a response speed and light emission intensity are obtained that are fully satisfactory for application to a scanning electron microscope or mass spectroscope. In addition, a cap layer 16 contributes to improvement in the persistence rate of light emission in the nitride semiconductor layer 14, so, with this light-emitting body 10, not only high-speed response and high light emission intensity are obtained, but also an excellent persistence rate.
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