发明授权
- 专利标题: Process and temperature insensitive flicker noise monitor circuit
- 专利标题(中): 过程和温度不敏感的闪烁噪声监测电路
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申请号: US12761544申请日: 2010-04-16
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公开(公告)号: US07915905B2公开(公告)日: 2011-03-29
- 发明人: Baher S. Haroun , Gaurav Chandra , Vijaya Bhaskar Rentala , Venkatesh Srinivasan , Hisashi Shichijo , Krishnaswamy Nagaraj
- 申请人: Baher S. Haroun , Gaurav Chandra , Vijaya Bhaskar Rentala , Venkatesh Srinivasan , Hisashi Shichijo , Krishnaswamy Nagaraj
- 申请人地址: US TX Dallas
- 专利权人: Texas Instruments Incorporated
- 当前专利权人: Texas Instruments Incorporated
- 当前专利权人地址: US TX Dallas
- 代理商 Ronald O. Neerings; Wade James Brady, III; Frederick J. Telecky, Jr.
- 主分类号: G01R31/00
- IPC分类号: G01R31/00
摘要:
In an apparatus and method for monitoring defects in wafers, a monitoring circuit is fabricated on an area of each one of the wafers. The monitoring circuit includes representative devices that replicate similar devices located in a die area of the wafers. Defects if present in the representative devices contribute to a generation of a noise, thereby causing an imbalance in a differential signal measurable across selected ones of the representative devices. A digitizing circuit that uses a common mode voltage as a reference to measure the imbalance digitizes the differential signal to a digital signal, the digital signal being indicative of the noise generated by the defects. The digital signal is stored over a configurable time interval to form a digital bit stream. The digital bit stream is compared to a reference to determine whether the defeats are within an allowable range.
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