发明授权
- 专利标题: Shielding, particulate reducing high vacuum components
- 专利标题(中): 屏蔽,颗粒减少高真空组件
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申请号: US11877713申请日: 2007-10-24
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公开(公告)号: US07919193B1公开(公告)日: 2011-04-05
- 发明人: Mohammed Tahmassebpur , Salam Harb , Liqun Han , Marian Mankos
- 申请人: Mohammed Tahmassebpur , Salam Harb , Liqun Han , Marian Mankos
- 申请人地址: US CA Milpitas
- 专利权人: KLA-Tencor Corporation
- 当前专利权人: KLA-Tencor Corporation
- 当前专利权人地址: US CA Milpitas
- 代理机构: Luedeka, Neely & Graham, P.C.
- 主分类号: B32B15/04
- IPC分类号: B32B15/04 ; B32B15/18
摘要:
A component for use in a high vacuum environment, the component including a core of non-magnetic Hastelloy with a cladding of nickel-iron covering the core at least in part. The component can be, for example, at least one of a gate valve for use in a high vacuum environment of an electron gun, a bearing, a slide way, a gate valve bearing, a rotary slide, a linear slide, an electron beam column, and electron beam chamber, and a vacuum chamber. In this manner, because the final mechanical tolerance is controlled by machining instead of part assembling, extremely high alignment accuracy is obtained. The final part provides field shielding as provided by the nickel alloy shell, low stray field provided by the non-magnetic Hastelloy, good vacuum performance, and tight mechanical tolerance control. Also, because Hastelloy has the advantage of a low oxidation rate in comparison to stainless steel and titanium, there is less contamination buildup due to conditions such as electron beam bombardment.