Invention Grant
US07920260B2 Measuring device for determining the size, size distribution and quantity of particles in the nanoscopic range 有权
用于确定纳米级范围内颗粒尺寸,尺寸分布和数量的测量装置

Measuring device for determining the size, size distribution and quantity of particles in the nanoscopic range
Abstract:
A measuring device determines the size, size distribution, and/or concentration of nanoscopic particles or hollow spaces in a measuring sample, the degree of opacity of such measuring samples, or the degree of roughness of surfaces by determining the wavelength and scattering angle dependent intensities of a measuring radiation scattered on a measuring sample. The measuring device comprises a retaining device for a measuring sample to be measured, a detector comprising at least one detector inlet, an evaluation unit, and at least two radiation sources that are respectively at a distance from each other and at a distance from the measuring sample. Via the radiation sources, a ray bundle can in each case be emitted in an essentially parallel beam in the direction of the measuring sample. The ray bundles directed onto the measuring sample are aligned or can be aligned in different angles onto the measuring sample.
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