Invention Grant
- Patent Title: Long-range surface plasmon optical waveguide sensor
- Patent Title (中): 远程表面等离子体光波导传感器
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Application No.: US12531220Application Date: 2008-02-28
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Publication No.: US07920268B2Publication Date: 2011-04-05
- Inventor: Seok Ho Song
- Applicant: Seok Ho Song
- Applicant Address: KR Seoul
- Assignee: IUCF-HYU (Industry-University Cooperation Foundation Hanyang University)
- Current Assignee: IUCF-HYU (Industry-University Cooperation Foundation Hanyang University)
- Current Assignee Address: KR Seoul
- Agency: Occhiuti Rohlicek & Tsao LLP
- Priority: KR10-2007-0024782 20070314
- International Application: PCT/KR2008/001159 WO 20080228
- International Announcement: WO2008/111745 WO 20080918
- Main IPC: G01N21/55
- IPC: G01N21/55 ; H01L27/18

Abstract:
The present invention provides a long-range surface plasmon optical waveguide sensor which has a reduced loss of an electromagnetic wave, an increased sensitivity and limitation of detection and a high analysis speed, and enables fabrication of a sensor of various sizes such as a small-sized or lightweight system, etc. To this end, the long-range surface plasmon optical waveguide sensor, comprising: a sensor section, wherein the sensor section comprises a substrate, a first dielectric layer stacked on the substrate, a metal thin film stacked on the first dielectric layer, a second dielectric layer stacked on the metal thin film and having a channel penetratingly formed therein in such a fashion that the top surface of the metal thin film is partially exposed into the channel, a metal strip stacked on the second dielectric layer in such a fashion that the underside thereof is partially exposed into the channel, and a third dielectric layer stacked on the metal strip; a light source section for inducing a surface plasmon resonance between the metal thin film and the metal strip; and a detection section for detecting and analyzing a change of light according to the surface plasmon resonance.
Public/Granted literature
- US20100097611A1 LONG-RANGE SURFACE PLASMON OPTICAL WAVEGUIDE SENSOR Public/Granted day:2010-04-22
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