Invention Grant
US07923279B2 Method and structure for reducing cross-talk in image sensor devices
有权
减少图像传感器设备串扰的方法和结构
- Patent Title: Method and structure for reducing cross-talk in image sensor devices
- Patent Title (中): 减少图像传感器设备串扰的方法和结构
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Application No.: US12405454Application Date: 2009-03-17
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Publication No.: US07923279B2Publication Date: 2011-04-12
- Inventor: Ching-Chun Wang , Tzu-Hsuan Hsu , Han-Chi Liu , Chun-Ming Su
- Applicant: Ching-Chun Wang , Tzu-Hsuan Hsu , Han-Chi Liu , Chun-Ming Su
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
Provided is a method of fabricating an image sensor device. The method includes providing a semiconductor substrate having a front side and a back side, forming a first isolation structure at the front side of the semiconductor substrate, thinning the semiconductor substrate from the back side, and forming a second isolation structure at the back side of the semiconductor substrate. The first and second isolation structures are shifted with respect to each other.
Public/Granted literature
- US20100181635A1 METHOD AND STRUCTURE FOR REDUCING CROSS-TALK IN IMAGE SENSOR DEVICES Public/Granted day:2010-07-22
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