A self-calibration circuit and method for capacitors are provided. A capacitor array is calibrated to approximate a reference capacitor according to an average parameter generated by calibrating the capacitor array multiple times. Since the capacitance of the compensation capacitor required to be connected to the target capacitor in parallel is determined according to the average parameter generated by performing the calibration multiple times, the error caused by a single calibration can be reduced, and meanwhile the calibration error caused by a reference voltage error or noise is reduced.