发明授权
US07929814B2 Sub-micron planar lightwave devices formed on an SOI optical platform
有权
在SOI光学平台上形成的亚微米平面光波器件
- 专利标题: Sub-micron planar lightwave devices formed on an SOI optical platform
- 专利标题(中): 在SOI光学平台上形成的亚微米平面光波器件
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申请号: US10830571申请日: 2004-04-23
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公开(公告)号: US07929814B2公开(公告)日: 2011-04-19
- 发明人: Prakash Gothoskar , Margaret Ghiron , Robert Keith Montgomery , Vipulkumar Patel , Kalpendu Shastri , Soham Pathak , Katherine A. Yanushefski
- 申请人: Prakash Gothoskar , Margaret Ghiron , Robert Keith Montgomery , Vipulkumar Patel , Kalpendu Shastri , Soham Pathak , Katherine A. Yanushefski
- 申请人地址: US PA Allentown
- 专利权人: Lightwire, Inc.
- 当前专利权人: Lightwire, Inc.
- 当前专利权人地址: US PA Allentown
- 代理商 Wendy W. Koba
- 主分类号: G02B6/10
- IPC分类号: G02B6/10 ; G02B6/12
摘要:
A set of planar, two-dimensional optical devices is able to be created in a sub-micron surface layer of an SOI structure, or within a sub-micron thick combination of an SOI surface layer and an overlying polysilicon layer. Conventional masking/etching techniques may be used to form a variety of passive and optical devices in this SOI platform. Various regions of the devices may be doped to form the active device structures. Additionally, the polysilicon layer may be separately patterned to provide a region of effective mode index change for a propagating optical signal.
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