发明授权
US07929814B2 Sub-micron planar lightwave devices formed on an SOI optical platform 有权
在SOI光学平台上形成的亚微米平面光波器件

Sub-micron planar lightwave devices formed on an SOI optical platform
摘要:
A set of planar, two-dimensional optical devices is able to be created in a sub-micron surface layer of an SOI structure, or within a sub-micron thick combination of an SOI surface layer and an overlying polysilicon layer. Conventional masking/etching techniques may be used to form a variety of passive and optical devices in this SOI platform. Various regions of the devices may be doped to form the active device structures. Additionally, the polysilicon layer may be separately patterned to provide a region of effective mode index change for a propagating optical signal.
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